@article{116101, author = {A Laracuente and M Bronikowski and A Gallagher}, title = {Chemical vapor deposition of nanometer size aluminum features on silicon surfaces using an STM tip}, year = {1996}, number = {107}, month = {1996-01-01}, publisher = {Proceedings of Atomically Controlled Surfaces and Interfaces Conference Appl Surf Sci}, language = {en}, }