@article{115856, author = {B Nelson and and A Gallagher}, title = {Hydrogenated amorphous silicon germanium alloys grown by the hot wire chemical vapor deposition technique, ed. by R. Schropp et al}, year = {1992}, number = {507}, month = {1992-01-01}, publisher = {Amorphous and Microcrystalline Silicon Technology--1998 Materials Research Society Symp}, language = {en}, }