@conference{11566,
  author = {Richard Allen and Victor Vartanian and David Read and Winthrop Baylies},
  title = {Metrology for 3D Integration},
  year = {2014},
  number = {61},
  month = {2014-05-13},
  publisher = {ECS Trasnsaction: Moore-Than-More 2014, Orlando, FL},
  doi = {https://doi.org/10.1149/06106.0105ecst},
  language = {en},
}