@misc{1155191,
  author = {W Murray Bullis},
  title = {Methods of measurement for semiconductor materials, process control, and devices.:},
  year = {1968},
  month = {1968-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.TN.472},
  language = {en},
}