@misc{1154876,
  author = {W Robert Thurber},
  title = {Determination of oxygen concentration in silicon and germanium by infrared absorption:},
  year = {1970},
  month = {1970-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.TN.529},
  language = {en},
}