@misc{1154706,
  author = {A J Baroody Jr. and W Murray Bullis},
  title = {Methods of measurement for semiconductor materials, process control, and devices ::quarterly report April 1 to June 30, 1970},
  year = {1970},
  month = {1970-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.TN.560},
  language = {en},
}