@misc{1154651, author = {W Murray Bullis}, title = {Methods of measurement for semiconductor materials, process control, and devices ::quarterly report July 1 to September 30, 1970}, year = {1971}, month = {1971-01-01 05:01:00}, publisher = {, National Institute of Standards and Technology, Gaithersburg, MD}, doi = {https://doi.org/10.6028/NBS.TN.571}, language = {en}, }