@misc{1154641,
  author = {George G Harman},
  title = {Application of capacitor microphones and magnetic pickups to the tuning and trouble shooting of microelectronic ultrasonic bonding equipment:},
  year = {1971},
  month = {1971-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.TN.573},
  language = {en},
}