@misc{1154466,
  author = {W Murray Bullis},
  title = {Methods of measurement for semiconductor materials, process control, and devices ::quarterly report January 1 to March 31, 1971},
  year = {1971},
  month = {1971-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.TN.598},
  language = {en},
}