@misc{1153696,
  author = {W Murray Bullis},
  title = {Methods of measurement for semiconductor materials, process control, and devices quarterly report ::January 1 to March 30, 1972},
  year = {1972},
  month = {1972-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.TN.733},
  language = {en},
}