@misc{1153486,
  author = {W Murray Bullis},
  title = {Methods of measurement for semiconductor materials, process control, and devices quarterly report ::October 1 to December 31, 1972},
  year = {1973},
  month = {1973-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.TN.773},
  language = {en},
}