@misc{1153411,
  author = {W Murray Bullis},
  title = {Methods of measurement for semiconductor materials, process control, and devices quarterly report ::January 1 to March 31, 1973},
  year = {1973},
  month = {1973-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.TN.788},
  language = {en},
}