@inbook{115286, author = {John Unguris and M Scheinfein and Michael Kelley and A Gavrin and Robert Celotta and Daniel Pierce}, title = {Scanning Electron Microscopy with Polarization Analysis (SEMPA)}, year = {1997}, month = {1997-01-01}, publisher = {Handbook of microscopy : applications in materials science, solid-state physics, and chemistry, Wiley-VCH, Weinheim, DE}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620471}, language = {en}, }