@misc{1150001,
  author = {Robert I Scace},
  title = {Semiconductor technology for the non-technologist, second edition:},
  year = {1990},
  month = {1990-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.4414},
  language = {en},
}