@article{114976,
  author = {Jabez McClelland and Robert Celotta},
  title = {Laser-Focused Atomic Deposition - Nanofabrication via Atom Optics},
  year = {2000},
  number = {367},
  month = {2000-05-15},
  publisher = {Thin Solid Films},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620525},
  language = {en},
}