@misc{1149006,
  author = {Robert I Scace},
  title = {Metrology for the semiconductor industry:},
  year = {1991},
  month = {1991-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.4653},
  language = {en},
}