@article{114881,
  author = {Jabez McClelland and R Gupta and Robert Celotta and G Porkolab},
  title = {Nanostructure Fabrication by Reactive-ion Etching of Laser-Focused Chromium on Silicon},
  year = {1998},
  number = {66},
  month = {1998-01-01},
  publisher = {Applied Physics B-Lasers and Optics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620488},
  language = {en},
}