@misc{1148046,
  author = {D Chandler-Horowitz and N V Nguyen and J F Marchiando and P M Amirtharaj},
  title = {Metrologic Support for the DARPANRL-XRL Mask Program::ellipsometric analyses of SiC thin films on Si},
  year = {1993},
  month = {1993-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.4860},
  language = {en},
}