@misc{1147911,
  author = {J C Marshall and M W Cresswell and C H Ellenwool and L W Linholm and P Roitman and M E Zaghloul},
  title = {The test guide for CMOS-ON-SIMOX test chips NIST3 and NIST4:},
  year = {1993},
  month = {1993-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.4890},
  language = {en},
}