@misc{1146101,
  author = {J A Dagata and A C Diebold and C K Shih and R J Colton},
  title = {Summary report::second workshop on industrial applications of scanned probe microscopy, May 2-3, 1995},
  year = {1995},
  month = {1995-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.5752},
  language = {en},
}