@misc{1145736,
  author = {Stephen Knight and Alice D Settle-Raskin},
  title = {National Semiconductor Metrology Program::project portfolio, FY 1997},
  year = {1997},
  month = {1997-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.5851r1997},
  language = {en},
}