@misc{1142951, author = {Jan Obrzut and C K Chiang and R Popielarz and R Nozaki}, title = {Evaluation of dielectric properties of polymer thin-film materials for application in embedded capacitance:}, year = {2000}, month = {2000-01-01 05:01:00}, publisher = {, National Institute of Standards and Technology, Gaithersburg, MD}, doi = {https://doi.org/10.6028/NIST.IR.6537}, language = {en}, }