@misc{1141761,
  author = {Stephen Knight and Joaquin V Martinez de Pinillos and Barbara J Belzer and Michele Buckley},
  title = {Silicon microelectronics programs at the National Institute of Standards and Technology::programs, activities, and accomplishments},
  year = {2001},
  month = {2001-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.6731},
  language = {en},
}