@misc{1140696,
  author = {Stephen Knight and Joaquin V Martinez de Pinillos and Michele Buckley},
  title = {Semiconductor microelectronics and nanoelectronics programs:},
  year = {2003},
  month = {2003-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.7010},
  language = {en},
}