@misc{1138626, author = {Stephen Knight and Joaquin V Martinez de Pinillos and Yaw S Obeng and Michele Buckley}, title = {Semiconductor microelectronics and nanoelectronics programs:}, year = {2008}, month = {2008-01-01 05:01:00}, publisher = {, National Institute of Standards and Technology, Gaithersburg, MD}, doi = {https://doi.org/10.6028/NIST.IR.7513}, language = {en}, }