@misc{1130266,
  author = {K.A. Bertness},
  title = {Dimensional measurement of nanostructures with scanning electron microscopy:},
  year = {2017},
  month = {2017-09-01 04:09:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.SP.250-96},
  language = {en},
}