@misc{1130136,
  author = {M C Croarkin and J R Ehrstein},
  title = {Standard Reference Materials ::The certification of 100 mm diameter silicon resistivity SRMs 2541 through 2547 using dual-configuration four-point probe measurements/},
  year = {1997},
  month = {1997-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.SP.260-131},
  language = {en},
}