@misc{1129686,
  author = {Robert F Berg and David S Green and George E Mattingly},
  title = {Workshop on mass flow measurement and control for the semiconductor industry:},
  year = {2001},
  month = {2001-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.SP.400-101},
  language = {en},
}