@article{112796, author = {Kao-Shuo Chang and Martin Green and John Suehle and Jason Hattrick-Simpers and Ichiro Takeuchi and K Ohmori and T Chikyow and S De and Prashant Majhi}, title = {Combinatorial Methodology for the Exploration of Metal Gate Electrodes on HfO2 for the Advanced Gate Stack}, year = {2008}, number = {13}, month = {2008-01-23}, publisher = {ECS Transactions}, language = {en}, }