@conference{111426,
  author = {Kin Cheung and John Suehle},
  title = {The Challenge of Measuring Defects in Nanoscale Dielectrics},
  year = {2008},
  month = {2008-05-26},
  publisher = {213th ECS meeting: Dielectrics for Nanosystems, Phoenix, AZ},
  language = {en},
}