@conference{111411, author = {Jason Campbell and Jin Qin and Kin Cheung and Liangchun Yu and John Suehle and A Oates and Kuang Sheng}, title = {The Origins of Random Telegraph Noise in Highly Scaled SiON nMOSFETs}, year = {2008}, month = {2008-10-17}, publisher = {2008 IEEE International Integrated Reliability Workshop, South Lake Tahoe, NV}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=33210}, language = {en}, }