@inbook{110536,
  author = {R Deslattes and R Mayti},
  title = {Analysis of Thin Layer Structures by X-Ray Reflectometry},
  year = {2001},
  number = {27},
  month = {2001-07-01},
  publisher = {Handbook of Silicon Semiconductor Metrology, Marcel Dekker Inc, New York, NY},
  language = {en},
}