@article{110241,
  author = {Barry Bauer and Eric Lin and V. Lee and Haonan Wang and Wen-Li Wu},
  title = {Structure and Property Characterization of Low-k Dielectric Porous Thin Films},
  year = {2001},
  number = {30},
  month = {2001-04-01},
  publisher = {Journal of Electronic Materials},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851702},
  language = {en},
}