@conference{10926,
  author = {Prem Rachakonda and Daniel Sawyer and Balasubramanian Muralikrishnan and Christopher Blackburn and Craig Shakarji and Gregory Strouse and Steven Phillips},
  title = {In-situ Temperature Calibration Capability for Dimensional Metrology},
  year = {2014},
  month = {2014-12-01},
  publisher = {In-situ Temperature Calibration Capability for Dimensional Metrology, Orlando, FL},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=915733},
  language = {en},
}