@conference{109066,
  author = {Martin Chiang and R Song and Alamgir Karim and Eric Amis},
  title = {Multivariant Measurement for Thin Film Adhesion as a Function of Temperature and Thin Film Thickness},
  year = {2003},
  number = {19(7)},
  month = {2003-05-01},
  publisher = {Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show | | |},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852168},
  language = {en},
}