@conference{108771,
  author = {R Davis and Elizabeth Moore and Donald Burgess and Michael Zachariah},
  title = {A Microcontamination Model for Rotating Disk Chemical Vapor Deposition Reactors},
  year = {1998},
  month = {1998-02-11},
  publisher = {International Conference on Characterization and Metrology for ULSI Technology},
  language = {en},
}