@article{108231,
  author = {John Gillen and R King and B Freibaum and R Lareau and J Bennett and F Chmara},
  title = {Negative Cesium Sputter Ion Source for Generating Cluster Primary Ion Beams for Secondary Ion Mass Spectrometry Analysis},
  year = {2001},
  number = {19},
  month = {2001-04-01},
  publisher = {Journal of Vacuum Science and Technology A},
  language = {en},
}