@conference{108111,
  author = {John Gillen and S Roberson and Albert Fahey and Marlon Walker and J Bennett and R Lareau},
  title = {Cluster Primary Ion Beam Secondary Ion Mass Spectrometry for Semiconductor Characterization},
  year = {2001},
  number = {550},
  month = {2001-01-01},
  publisher = {Characterization and Metrology for ULSI Technology 2000, International Conference  | | Characterization and Metrology for ULSI Technology |AIP, backfill, -1},
  language = {en},
}