@article{108001,
  author = {Christopher Stafford},
  title = {A New 'Wrinkle' in Nanometrology},
  year = {2004},
  number = {16(11)},
  month = {2004-11-01},
  publisher = {Optical Engineering Magazine},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852408},
  language = {en},
}