@conference{107366,
  author = {Michael Postek},
  title = {Advanced Metrology Needs for Nanotechnology and Nanomanufacturing},
  year = {2005},
  month = {2005-01-01},
  publisher = {2005 Electron, Ion, and Photon-Beam Technology & Nano-fabrication Conference, Grande Lakes, FL},
  language = {en},
}