@article{107191,
  author = {Kao-Shuo Chang and Martin Green and Jason Hattrick-Simpers and John Suehle and Ichiro Takeuchi and Ozgur Celik and S De},
  title = {Determination of Work Functions in the Ta<sub>1-x</sub>Al<sub>x</sub>N<sub>y</sub>/HfO<sub>2</sub> Advanced Gate Stack Using Combinatorial Methodology},
  year = {2008},
  number = {55},
  month = {2008-01-24},
  publisher = {IEEE Transactions on Electron Devices},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851089},
  language = {en},
}