@conference{107026,
  author = {Michael Postek},
  title = {2005 Variable Pressure/Environmental Scanning Electron Microscopy: Application to Photomask Dimensional Metrology},
  year = {2005},
  month = {2005-01-01},
  publisher = {Nanotechnology and Nanomanufacturing Micro Nano Breakthrough Conference, Portland, OR},
  language = {en},
}