@conference{107006,
  author = {Scott Wight and Richard Cavicchi and M Nystrom and F DiMeo},
  title = {Microhotplate Chemical Vapor Deposition in the Environmental SEM Chamber},
  year = {1997},
  month = {1997-12-01},
  publisher = {Microscopy and Microanalysis, xxxx, -1},
  language = {en},
}