@article{106951,
  author = {Terrence Jach and E Landree},
  title = {Grazing Incidence X-Ray Photoemission Spectroscopy and the Accuracy of Thickness Measurements of CMOS Gate Dielectrics},
  year = {2001},
  number = {31},
  month = {2001-08-01},
  publisher = {Surface and Interface Analysis},
  language = {en},
}