@article{106891,
  author = {Terrence Jach and Joseph Dura and Nhan Nguyen and J Swider and G Cappello and Curt Richter},
  title = {Comparative Thickness Measurements of SiO<sub>2</sub>/Si Films for Thickness Less than 10 nm},
  year = {2004},
  number = {36},
  month = {2004-01-01},
  publisher = {Surface and Interface Analysis},
  language = {en},
}