@misc{106471,
  author = {Andras Vladar and Richard Silver and James Potzick and John Villarrubia},
  title = {Development of Photomask Artifacts and Metrology for the 65 nm Device Generation with Extensibility Beyond},
  year = {2004},
  month = {2004-01-01},
  publisher = {ISMT Final Report},
  language = {en},
}