@article{10616,
  author = {Shinichiro Muramoto and Derk Rading and Brian Bush and John Gillen and David Castner},
  title = {Low Temperature Plasma for Bevel Crater Depth Profiling of Crosslinking Organic Multilayers: Comparison with C60 and Argon Gas Cluster Sources},
  year = {2014},
  number = {28},
  month = {2014-07-06},
  publisher = {Rapid Communications in Mass Spectrometry},
  doi = {https://doi.org/10.1002/rcm.6981},
  language = {en},
}