@misc{105981,
  author = {Craig Sansonetti and Joseph Reader},
  title = {Wavelength Characterization of a Molecular F2 Laser at 157 nm for DUV Lithography},
  year = {2001},
  number = {No. 58},
  month = {2001-05-01},
  publisher = {Lambda Highlights},
  language = {en},
}