@article{105191,
  author = {Angela Davies and Tony Schmitz and R Parks and Christopher Evans},
  title = {Silicon Wafer Thickness Variation Measurements Using the NIST Infrared Interferometer},
  year = {2003},
  number = {42 (8)},
  month = {2003-08-01},
  publisher = {Optical Engineering},
  language = {en},
}