@inbook{104101,
  author = {Theodore Vorburger and John Dagata and G. Wilkening and K Iizuka},
  title = {Characterization of Surface Topography},
  year = {1998},
  number = {5},
  month = {1998-01-01},
  publisher = {Methods of Surface Characterization, Volume 5, Beam Effects, Surface Topography, and Depth Profiling in Surface Analysis, edited by A. W. Czanderna, T. E. Madey, C. J. Powell, Plenum Press, New York, NY},
  language = {en},
}